EDN

Evolution of MEMS toward a semiconductor model

Almost since the inception of MEMS, the idea of integrating MEMS devices with CMOS circuits has been a grand goal and a subject of much discussion in the industry. In fact, one of the driving forces ...
Electronic Design

Interconnecting Mini MEMS Spawns Max Challenges

If you're looking for a challenge, try interconnecting microelectromechanical-systems (MEMS) ICs with conventional ICs and other MEMS ICs. If you've mastered that skill, move to the front of the line, ...
Nanowerk

A two-wafer approach for integration of optical MEMS and photonics on silicon substrate

(Nanowerk News) Microelectromechanical systems (MEMS), which consist of tiny moving parts driven by electrical signals, have found ready applications in optical communication systems. They are ...
NextBigFuture

Low-cost MEMS Fabrication Technology Using a Replica Molding Technique

Kazuma Kurihara (Senior Researcher) and Hideki Takagi (Leader), Large Scale Integration Team, the Research Center for Ubiquitous MEMS and Micro Engineering have developed a microelectromechanical ...
Electronic Design

CMOS Acoustic MEMS Structure Yields On-Chip 8- to 12-GHz Resonator

Using a standard CMOS process, researchers have combined acoustic MEMS and other technology to create a >10-GHz on-chip resonator function for filters and VCOs. How standard CMOS process can be used ...
New Electronics

MEMS - Cutting costs and size

MEMS advances are set to transform the future of sensors and the mobile phone industry, according to Dr Josep Montanyà i Silvestre, CEO at Nanusens. Advances in MEMs technology are set to transform ...
EDN

Why MEMS Need to Be More Like ASICs

They are undeniably pervasive—each of us uses equipment that employs them on a daily basis. I'm referring to those marvels of micro-miniaturization, microelectromechanical systems, or MEMS. You find ...